Ultra-thin foil-type tantalum gasket
The product Ultra-thin tantalum gasket is mainly made by using high-purity Ta1 metal tantalum raw material, through rolling, precise cutting, surface acid washing and grinding to form an extremely thin tantalum ring-shaped gasket.
It has a flexible and highly extensible texture, without cracks or burrs, and the surface is clean.
It is specially designed for precise low-pressure sealing, high-purity chambers, and highly corrosive pipelines.
Product Parameters
| Products name | Ultra-thin foil-type tantalum gasket |
| Products material | Tantalum |
| Purity | Ta1 ≥ 99.95% Ta; Ta0 ultra-pure ≥ 99.99% Ta |
| Density | 16.68 g/cm³ |
| Melting point | 2996 ℃ |
| Boiling point | 5425 ℃ |
| Linear expansion coefficient (20–1000 ℃) | 6.5×10⁻⁶ /℃ |
| Thermal conductivity (20 ℃) | 57.5 W/(m·K) |
| Resistivity (20 ℃) | 13.5 μΩ·cm |
| Elastic modulus | 186 GPa |
| Hardness | HV 100–180; annealed soft state HV 60–90 |
| Thickness range | 0.025mm, 0.05mm, 0.08mm, 0.1mm, 0.15mm 0.2mm (or customized thickness) |
| Inner diameter | 1mm - 500mm |
| Outer diameter | 3mm - 600mm |
| urface treatment | Acid washing to remove oxide, mirror matte polishing, high-temperature degassing treatment, no oil stains or impurities |
| Common shapes | Standard circular ring-shaped foil pads. Square, porous, and irregular-shaped foil sheets can be processed as per customer requirements |
Ultra-thin foil-type tantalum gasket Advantages
1. Excellent flexibility, high sealing and adhesion, and strong plasticity of the thin tantalum foil. After compression, it can fill in tiny scratches and flat gaps on the flange, achieving high gas tightness even under low pressure. Hard tungsten gaskets cannot achieve the same sealing effect.
2. Ultra-thin design, does not occupy assembly space. Suitable for precise structures with extremely small equipment gaps and limited installation space. It will not change the assembly fit dimensions.
3. Exceptionally resistant to acid and alkali corrosion. It can withstand common temperatures of hydrochloric acid, sulfuric acid, nitric acid, aqua regia, and various organic acids. Its corrosion resistance far exceeds that of stainless steel and titanium gaskets, and it is unlikely to be corroded, perforated, or leaky.
4. Low release of gas, low vapor pressure, high purity and no impurities are released. It has extremely low volatility under high-temperature vacuum conditions and will not contaminate wafers, chambers, or high-purity solutions.
5. The integrated heat and electricity conducting function can simultaneously serve as a sealing gasket, a heat conducting buffer pad, and a conductive partition, simplifying the structure of the components.
6. Lightweight and easy to assemble, it is not prone to being crushed. Compared with the ultra-thin tungsten gasket which has high brittleness and is prone to cracking, the tantalum foil has strong toughness and is unlikely to be damaged during normal assembly and disassembly.
Ultra-thin tantalum gasket applications
1. For small-scale strong acid pipelines, miniature valves, and micro-reactor flange seals in chemical anti-corrosion equipment, preventing leakage of strong corrosive media.
2. For sealing of semiconductor vacuum equipment such as coating machines, sputtering equipment, small vacuum chambers, and ion source accessories, ensuring cleanliness and no exudation of the chambers.
3. For sealing of laboratory instruments such as electrochemical electrolytic cells, micro-corrosion experimental devices, and small high-temperature tubular furnaces.
4. For sealing foils and pads for precise electronic components such as tantalum capacitors, vacuum tubes, and miniature heating devices, with conductive and heat-conductive intervals.
5. For sealing of medical precision instruments such as small medical anti-corrosion pipelines and minimally invasive equipment, ensuring biocompatibility and no harmful substance exudation.
6. For sealing pads of small high-temperature heat treatment equipment such as inert atmosphere small sintering furnaces and vacuum sample racks.
Tantalum gasket Service Life Explanation
1. Normal temperature weak acid / neutral medium, vacuum inert environment (optimal working condition) - No oxidation, no strong corrosion. Regular disassembly and maintenance: 1 to 3 years. Long-term non-disassembly, stable constant temperature operation can last for over 3 years.
2. Normal temperature high-concentration strong acid, continuous corrosive conditions - The medium is continuously soaked and eroded: 6 to 12 months. If the medium does not contain hydrofluoric acid, it can be used stably. Hydrofluoric acid environment will cause rapid corrosion and it is not recommended for use.
3. High temperature vacuum / inert atmosphere (≤ 500℃) - Oxygen-free protection, regular degassing: 8 months to 2 years.
4. Oxygen-rich high-temperature environment (> 500℃) - The tantalum surface rapidly oxidizes to form an oxide film, sealing failure accelerates, service
life is significantly shortened. It can only be used temporarily for a short period of time and is not recommended for long-term operation.
Key points for extending service life
1. Avoid contact with hydrofluoric acid and high-temperature fuming sulfuric acid;
2. In high-temperature oxygenated conditions, introduce nitrogen or argon for protection;
3. Smoothly grind the flange surface, without sharp scratches, to prevent the foil from being scratched or damaged;
4. Before using high-purity equipment, perform high-temperature degassing to reduce medium adhesion and corrosion.
Contact person : Tracy
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